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Entry

Category:
Microscopes

Type of instrument:
Dual-beam microscope (SEM/FIB)

Name of the parent reasearch infrastructure (optional):
Thermo Fisher Helios Hydra 5 UX (StrucMatLab)

Additional methods and synergies with other instruments (optional):
EDS, EBSD

Identification code (optional):
9955821

Short description of the instrument (max. 5000 characters):
The dual-beam microscope Helios 5 Hydra UX, manufactured by Thermo Fisher Scientifc, is operated within StrucMatLab at Materials Chemistry since 2022 and equipped with the combination of a field emission electron source and a plasma ion source. The plasma source allows for gas selection of xenon, argon, oxygen and nitrogen. Xenon is significantly larger and heavier than gallium and together with ion beam currents of up to 2.5 μΑ the material removal rate is 40 times larger compared to gallium. Thus, the microscope is primarily used for the analysis of large volumes with dimensions of up to ~500 μm length, ~500 μm width as well as ~300 μm height. Moreover, the available gases are beneficial for preparation of atom probe specimens, thin lamellae, cantilevers and micropillars from materials, which are sensitive to gallium incorporation such as aluminum or magnesium.

Manufacturer:
Thermo Fisher Scientific

Year of acquisition (optional):
2021

Model:
Helios Hydra 5 UX

Necessary / restrictive conditions for use (optional):
Solid, conductive and non-conductive (limited)

User groups:
Interne

Type of usage:
Dienstleistung und Anwender*in

Faculty:

• Faculty 5 – Georesources and Materials Engineering

Department / teaching unit (optional):
Materials Science and Engineering

Institutional identification number (IKZ):
StrucMatLab / Materials Chemistry

Website (optional)
https://www.strucmatlab.rwth-aachen.de/cms/strucmatlab/Aktivitaeten/~bkzbvu/Fokussierter-Ionenstrahl-Plasma-/lidx/1/

Adress (optional):
Kopernikusstr. 10, 52074 Aachen

Contact person:
Dr. Marcus Hans

Email address (optional):
hans@mch.rwth-aachen.de